Status : Published

Format Language
PDF + ePub
Paper
  • CHF151
Convert Swiss francs (CHF) to your currency

Abstract

This document specifies a method for the quantitative depth profiling of amorphous heavy metal oxide ultrathin films on Si substrates using medium energy ion scattering (MEIS).

Standard first page

Read sample 

Preview this standard in our Online Browsing Platform (OBP)

General information

  • Status
     : Published
    Publication date
     : 2022-06
    Stage
    : International Standard published [60.60]
  • Edition
     : 1
    Number of pages
     : 29
  • Technical Committee :
    ISO/TC 201/SC 4
    ICS :
    71.040.40 
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goals

9
Industry, Innovation and Infrastructure
7
Affordable and Clean Energy

Got a question?

Check out our FAQs

Customer care
+41 22 749 08 88

Opening hours:
Monday to Friday - 09:00-12:00, 14:00-17:00 (UTC+1)

  2. Store
  3. Standards catalogue
  4. TC
  5. ISO/TC 201/SC 4
  6. ISO 23170:2022