Status : Published (To be revised)

This standard was last reviewed and confirmed in 2018. Therefore this version remains current.
This standard will be replaced by ISO/DIS 25178-603
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Abstract

ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

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General information

  • Status
     : Published
    Publication date
     : 2013-10
    Stage
    : International Standard to be revised [90.92]
  • Edition
     : 1
    Number of pages
     : 28
  • Technical Committee :
    ISO/TC 213
    ICS :
    17.040.20 
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