International Standard
ISO 25178-603:2025
Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
Reference number
ISO 25178-603:2025
Edition 2
2025-02
© ISO 2025
Read sample
Published (Edition 2, 2025)

ISO 25178-603:2025

Language
Format
CHF 98
Convert Swiss francs (CHF) to your currency

Abstract

This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.

General information

  • Status
     : Published
    Publication date
     : 2025-02
    Stage
    : International Standard published [60.60]
  • Edition
     : 2
    Number of pages
     : 18
  • Technical Committee :
    ISO/TC 213
    ICS :
    17.040.20 
  • RSS updates

Life cycle

Got a question?

Check out our Help and Support

  2. Store
  3. Standards catalogue
  4. ICS
  5. 17
  6. 17.040
  7. 17.040.20
  8. ISO 25178-603:2025