Resumen
This International Standard defines the most important quantities that characterize an energy-dispersive X-ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This International Standard is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This International Standard specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309[2] and ASTM E1508[3] and is outside the scope of this International Standard.
Informaciones generales
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Estado: RetiradaFecha de publicación: 2012-08Etapa: Retirada de la Norma Internacional [95.99]
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Edición: 2Número de páginas: 11
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Comité Técnico :ISO/TC 202ICS :71.040.99
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Ciclo de vida
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Anteriormente
RetiradaISO 15632:2002
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Ahora
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Revisada por
PublicadoISO 15632:2021