Resumen
ISO 5302:2003 specifies methods for the measurements of performance characteristics of turbomolecular pumps. It is applicable to all sizes and all types of turbomolecular pumps, with mechanical or magnetic bearings, and with or without an additional drag stage.
Informaciones generales
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Estado: RetiradaFecha de publicación: 2003-07Etapa: Retirada de la Norma Internacional [95.99]
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Edición: 1Número de páginas: 14
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Comité Técnico :ISO/TC 112ICS :23.160
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