Abstract
ISO 17973:2016 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.
General information
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Status: Under developmentStage: Final text received or FDIS registered for formal approval [50.00]
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Edition: 3
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Technical Committee :ISO/TC 201/SC 7ICS :71.040.40
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Life cycle
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PublishedISO 17973:2016
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