ISO/DIS 19606

Status : Under development

	Format	Language
std 1 63	PDF
std 2 63	Paper

CHF63

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Abstract

ISO 19606:2017 describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 μm to 2,5 μm.