ISO 18115-3:2022
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ISO 18115-3:2022
76357

Abstract

 Preview

This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.


General information 

  •  :  Published
     : 2022-06
  •  : 1
     : 35
  •  : ISO/TC 201/SC 1 Terminology
  •  :
    01.040.71 Chemical technology (Vocabularies)
    71.040.40 Chemical analysis

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