International Standard
IEC/TR 63258:2021
Nanotechnologies — A guideline for ellipsometry application to evaluate the thickness of nanoscale films
Reference number
IEC/TR 63258:2021
Edition 1
2021-03
© ISO 2024
International Standard
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Published (Edition 1, 2021)

IEC/TR 63258:2021

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Language
CHF 40
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Abstract

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

General information

  • Status
     : Published
    Publication date
     : 2021-03
    Stage
    : International Standard published [60.60]
  • Edition
     : 1
    Number of pages
     : 16
  • Technical Committee :
    ISO/TC 229
    ICS :
    07.120 
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goal

9
Industry, Innovation and Infrastructure

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