Abstract
ISO 14644-8:2013 establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.
ISO 14644-8:2013 currently considers only concentrations of air chemical contaminants between 100 and 10−12 g/m3 under cleanroom operational conditions.
ISO 14644-8:2013 is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process.
It is not the intention of ISO 14644-8:2013 to describe the nature of air chemical contaminants.
ISO 14644-8:2013 does not give a classification of surface chemical contamination.
General information
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Status: WithdrawnPublication date: 2013-02Stage: Withdrawal of International Standard [95.99]
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Edition: 2Number of pages: 22
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Technical Committee :ISO/TC 209ICS :13.040.35
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Life cycle
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Previously
WithdrawnISO 14644-8:2006
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Now
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Revised by
PublishedISO 14644-8:2022
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