ISO 14644-6:2007
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ISO 14644-6:2007
39841

Abstract 

ISO 14644-6:2007 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.


General information 

  •  :  Withdrawn
     : 2007-07
  •  : 1
     : 34
  •  : ISO/TC 209 Cleanrooms and associated controlled environments
  •  :
    13.040.35 Cleanrooms and associated controlled environments

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