Reference number
ISO 14644-6:2007
© ISO 2024
ISO 14644-6:2007
Cleanrooms and associated controlled environments — Part 6: Vocabulary
Edition 1
2007-07
Withdrawn
Withdrawn (Edition 1, 2007)

Abstract

ISO 14644-6:2007 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.

General information

  • Status
     : Withdrawn
    Publication date
     : 2007-07
    Stage
    : Withdrawal of International Standard [95.99]
  • Edition
     : 1
    Number of pages
     : 34
  • Technical Committee :
    ISO/TC 209
    ICS :
    13.040.35 
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