Abstract
ISO 18516:2006 describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 micrometre. The grid method is suitable if the lateral resolution is expected to be less than 1 micrometre but more than 20 nm. The gold-island method is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm.
Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.
General information
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Status: WithdrawnPublication date: 2006-11Stage: Withdrawal of International Standard [95.99]
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Edition: 1Number of pages: 24
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Technical Committee :ISO/TC 201/SC 2ICS :71.040.40
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Life cycle
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Now
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Revised by
PublishedISO 18516:2019
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