This document describes a calibration and verification method for a light scattering liquid-borne particle counter (LSLPC), which is used to measure the size and particle number concentration of particles suspended in liquid. The light scattering method described in this document is based on single particle measurements. The typical size range of particles measured by this method is between 0,1 µm and 10 µm in particle size.
The method is applicable to instruments used for the evaluation of the cleanliness of pure water and chemicals, as well as the measurement of number and size distribution of particles in various liquids. The measured particle size using the LSLPC depends on the refractive index of particles and medium; therefore, the measured particle size is equivalent to the calibration particles in pure water.
The following are within the scope of this document:
— size setting error;
— counting efficiency;
— size resolution;
— false count;
— maximum particle number concentration;
— sampling flow rate error;
— sampling time error;
— sampling volume error;
— calibration interval;
— reporting results from test and calibration.